| Chamber | Vertical Orientation, 1-door |
|---|---|
| Material | Stainless Steel 304/316 |
| Evaporation Source | Thermal Filament, Thermal Boat, Thermal Box, Rod, Crucibles |
| Deposition Materials | Aluminum, Gold, Silver, Chromium, Copper, Indium, Indium Tin Oxide, Nickel |
| Factory Location | Shanghai City, China |
