| Chamber | Vertical Orientation, 1-door |
|---|---|
| Material | Stainless Steel 316 |
| Vacuum Technology | PVD Hard Coating, CrN Coating, Pvd Plating, Cathodic Arc Evaporation |
| Deposition Sources | Arc Sources |
| Coating Films | Cr, CrN, CrC Etc. Metal Film Plating, Titanium Nitride, Titanium Carbide, Zirconium Nitride, Chromium Nitride, TiAlN, CrC |
